JPH0354064U - - Google Patents
Info
- Publication number
- JPH0354064U JPH0354064U JP11211289U JP11211289U JPH0354064U JP H0354064 U JPH0354064 U JP H0354064U JP 11211289 U JP11211289 U JP 11211289U JP 11211289 U JP11211289 U JP 11211289U JP H0354064 U JPH0354064 U JP H0354064U
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- image processing
- processing device
- microscope
- sample stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims 1
- 238000003384 imaging method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Processing (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11211289U JPH0354064U (en]) | 1989-09-27 | 1989-09-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11211289U JPH0354064U (en]) | 1989-09-27 | 1989-09-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0354064U true JPH0354064U (en]) | 1991-05-24 |
Family
ID=31660565
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11211289U Pending JPH0354064U (en]) | 1989-09-27 | 1989-09-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0354064U (en]) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6211139A (ja) * | 1985-06-28 | 1987-01-20 | Hitachi Electronics Eng Co Ltd | 異物検査装置 |
-
1989
- 1989-09-27 JP JP11211289U patent/JPH0354064U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6211139A (ja) * | 1985-06-28 | 1987-01-20 | Hitachi Electronics Eng Co Ltd | 異物検査装置 |
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