JPH0354064U - - Google Patents

Info

Publication number
JPH0354064U
JPH0354064U JP11211289U JP11211289U JPH0354064U JP H0354064 U JPH0354064 U JP H0354064U JP 11211289 U JP11211289 U JP 11211289U JP 11211289 U JP11211289 U JP 11211289U JP H0354064 U JPH0354064 U JP H0354064U
Authority
JP
Japan
Prior art keywords
inspected
image processing
processing device
microscope
sample stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11211289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11211289U priority Critical patent/JPH0354064U/ja
Publication of JPH0354064U publication Critical patent/JPH0354064U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP11211289U 1989-09-27 1989-09-27 Pending JPH0354064U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11211289U JPH0354064U (en]) 1989-09-27 1989-09-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11211289U JPH0354064U (en]) 1989-09-27 1989-09-27

Publications (1)

Publication Number Publication Date
JPH0354064U true JPH0354064U (en]) 1991-05-24

Family

ID=31660565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11211289U Pending JPH0354064U (en]) 1989-09-27 1989-09-27

Country Status (1)

Country Link
JP (1) JPH0354064U (en])

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6211139A (ja) * 1985-06-28 1987-01-20 Hitachi Electronics Eng Co Ltd 異物検査装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6211139A (ja) * 1985-06-28 1987-01-20 Hitachi Electronics Eng Co Ltd 異物検査装置

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